High-Q capacitive-piezoelectric AlN Lamb wave resonators

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2013, Pages 114-117

  Yen, Ting Ta ^a   Pisano, Albert P ^a   Nguyen, Clark T C ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM NITRIDE (ALN); BANDWIDTH FILTERS; DESIGN PARAMETERS; EFFECTIVE COUPLING; INTER-DIGITAL TRANSDUCER ELECTRODES; LAMB WAVE RESONATORS; PIEZO-ELECTRIC STRUCTURES; RESONANCE FREQUENCIES;

ACOUSTIC SURFACE WAVE DEVICES; ALUMINUM NITRIDE; BANDPASS FILTERS; ELECTRODES; ENERGY DISSIPATION; PIEZOELECTRICITY; TELECOMMUNICATION SYSTEMS; TRANSDUCERS; ULTRASONIC TRANSDUCERS; WAVE PROPAGATION;

MEMS;

EID: 84875432933     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2013.6474190     Document Type: Conference Paper

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