Micromachined sapphire GHz lateral overtone bulk acoustic resonators transduced by aluminum nitride

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2012, Pages 27-30

  Kuo, Nai Kuei ^a   Gong, Songbin ^a   Hartman, Jeffrey ^b   Kelliher, James ^b   Miller, Wayne ^b   Parke, Justin ^b   Krishaswamy, Silai V ^b   Adam, John D ^b   Piazza, Gianluca ^a  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

^b NORTHROP GRUMMAN CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALN; BULK ACOUSTIC WAVE RESONATOR; C-PLANE SAPPHIRE; COVERAGE RATIO; HIGH QUALITY FACTORS; LAYER TRANSFER PROCESS; LIMIT SETS; MATERIAL QUALITY; MECHANICAL ENERGY DISSIPATION; MICROMACHINED;

ALUMINUM NITRIDE; ENERGY DISSIPATION; MEMS; PHONONS;

SAPPHIRE;

EID: 84860457113     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2012.6170085     Document Type: Conference Paper

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