Nanopatterning by Area-Selective Atomic Layer Deposition

Atomic Layer Deposition of Nanostructured Materials

Volumn , Issue , 2012, Pages 193-225

  Lee, Han Bo Ram ^a   Bent, Stacey F ^a  

^a Stanford University   (United States)

Author keywords

Area selective atomic layer deposition; Microcontact printing; Nanopatterns; Octadecyltrichlorosilane; Self assembled monolayers

Indexed keywords

EID: 84869047192     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1002/9783527639915.ch9     Document Type: Chapter

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