Dichlorodimethylsilane as an anti-stiction monolayer for MEMS: A comparison to the octadecyltrichlosilane self-assembled monolayer

Journal of Microelectromechanical Systems

Volumn 10, Issue 1, 2001, Pages 41-49

  Ashurst, W Robert ^a   Yau, Christina ^a   Carraro, Carlo ^a   Maboudian, Roya ^a   Dugger, Michael T ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

MEMS; Self assembled monolayer; Stiction; Tribology

Indexed keywords

ADHESION; ATOMIC FORCE MICROSCOPY; FRICTION; INTERFACES (MATERIALS); LUBRICATION; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; PROTECTIVE COATINGS; THERMODYNAMIC STABILITY;

ANTI-STICTION MONOLAYERS; CONTACT ANGLE ANALYSIS (CAA); SELF-ASSEMBLED MONOLAYERS;

MONOLAYERS;

EID: 0035279363     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.911090     Document Type: Article

References (21)

1. Control tribological and mechanical properties of MEMS surfaces. Part I: Critical review
2. Adhesion related failure mechanisms in micromechanical devices
3. Critical review: Adhesion in surface micromechanical structures
4. Stiction in surface micromachining
5. Surface engineering and microtribology for micromechanical systems
6. The effect of release-etch processing on surface microstructure stiction
7. Self-assembled monolayer films as durable anti-stiction coatings for polysilicon microstructures
8. Alkyltrichlorosilane-based self assembled monolayer films for stiction reduction in silicon micromachines
9. Silanization of solid substrates - A step toward reproducibility
10. Alkene based monolayer films as anti-stiction coatings for polysilicon MEMS
11. A new class of surface modification for stiction reduction
12. A simple experimental technique for the measurement of the work of adhesion of microstructures
13. Accurate method for determining adhesion of cantilever beams
14. Adhesion of polysilicon microbeams in controlled humidity ambients
15. Friction and wear in surface micromachined tribological test devices
16. Self-assembled monolayers as anti-stiction coatings for MEMS: Characteristics and recent developments
17. Interferometric measurement for improved understanding of boundary effects in micromachined beams
18. Microfabricated actuators and their application to optics
19. Thermal behavior of alkyl monolayers on silicon surfaces
20. Surface processes in MEMS technology