Vapor phase anti-stiction coatings for MEMS

IEEE Transactions on Device and Materials Reliability

Volumn 3, Issue 4, 2003, Pages 173-178

  Ashurst, W Robert ^a   Carraro, C ^a   Maboudian, Roya ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

MEMS; Monolayer coatings; Stiction; Vapor coatings

Indexed keywords

ACCELEROMETERS; ADHESION; COATINGS; DEPOSITION; FRICTION; MICROSTRUCTURE; MONOLAYERS; STICTION;

MEMS; MONOLAYER COATINGS; VAPOR COATINGS;

MICROELECTROMECHANICAL DEVICES;

EID: 3042842463     PISSN: 15304388     EISSN: None     Source Type: Journal    
DOI: 10.1109/TDMR.2003.821540     Document Type: Review

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