Creating micro- and nanostructures on tubular and spherical surfaces

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 6, 2007, Pages 2412-2418

  Lima, O ^a   Tan, L ^a   Goel, A ^a   Negahban, M ^a   Li, Z ^b  

^a UNIVERSITY OF NEBRASKA LINCOLN   (United States)

^b PEKING UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

MICROLENS ARRAYS; SPHERICAL SURFACES;

FINITE ELEMENT METHOD; GEOMETRY; LITHOGRAPHY; MATHEMATICAL MODELS; MICROLENSES; MICROSTRUCTURE;

NANOSTRUCTURES;

EID: 37149045600     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2804428     Document Type: Article

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