Selective chemical vapor deposition of platinum and palladium directed by monolayers patterned using microcontact printing

Langmuir

Volumn 13, Issue 14, 1997, Pages 3833-3838

  Jeon, Noo Li ^a   Lin, Wenbin ^b   Erhardt, Martin K ^b   Girolami, Gregory S ^b   Nuzzo, Ralph G ^a,b  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; FILM GROWTH; GRAIN SIZE AND SHAPE; HYDROGEN; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PALLADIUM; PLATINUM; SILANES; SUBSTRATES; THERMAL EFFECTS; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

MICROCONTACT PRINTING;

METALLIC FILMS;

EID: 0031561083     PISSN: 07437463     EISSN: None     Source Type: Journal    
DOI: 10.1021/la970167e     Document Type: Article

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