Alkene based monolayer films as anti-stiction coatings for polysilicon MEMS

Sensors and Actuators, A: Physical

Volumn 91, Issue 3, 2001, Pages 239-248

  Ashurst, W Robert ^a   Yau, Christina ^a   Carraro, Carlo ^a   Lee, Christina ^a   Kluth, G Jonathan ^a   Howe, Roger T ^a   Maboudian, Roya ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Adhesion; Friction; Octadecene; SAM; Stiction; Tribology

Indexed keywords

ADHESION; ATOMIC FORCE MICROSCOPY; CONTACT ANGLE; FRICTION; MONOLAYERS; OLEFINS; STICTION; TRIBOLOGY; X RAY PHOTOELECTRON SPECTROSCOPY; COATINGS; FREE RADICAL REACTIONS; PLASTIC FILMS; POLYSILICON; SILANES;

ALKENE BASED MONOLAYER FILMS; ANTI-STICTION COATINGS; HYDROGEN TERMINATED SILICON; OCTADECYLTRICHLOROSILANE; OCTADECENE; POLYSILICON MICROELECTROMECHANICAL SYSTEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 0035880221     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00593-3     Document Type: Article

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