Selective-area atomic layer epitaxy growth of ZnO features on soft lithography-patterned substrates

Applied Physics Letters

Volumn 79, Issue 11, 2001, Pages 1709-1711

  Yan, M ^a   Koide, Y ^a   Babcock, J R ^a   Markworth, P R ^a   Belot, J A ^a   Marks, T J ^a   Chang, R P H ^a  

^a NORTHWESTERN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035839824     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1402959     Document Type: Article

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