Thermal stability of vapor phase deposited self-assembled monolayers for MEMS anti-stiction

Journal of Micromechanics and Microengineering

Volumn 16, Issue 11, 2006, Pages 2259-2264

  Zhuang, Yan Xin ^a   Hansen, Ole ^a   Knieling, Thomas ^b,d   Wang, Christian ^c   Rombach, Pirmin ^c   Lang, Walter ^b   Benecke, Wolfgang ^b   Kehlenbeck, Markus ^b,e   Koblitz, Jörn ^b  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^b UNIVERSITY OF BREMEN   (Germany)

^c Sonion A/S   (Denmark)

^d FRAUNHOFER INSTITUTE FOR PHOTONIC MICROSYSTEMS   (Germany)

^e Hella Fahrzeugkomponenten GmbH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DEGRADATION; ELECTRONICS PACKAGING; FLUOROCARBONS; MICROELECTROMECHANICAL DEVICES; STICTION; THERMODYNAMIC STABILITY; VAPOR PHASE EPITAXY;

FLUOROCARBON COATINGS; HYDROCARBON COATING; MEMS PACKAGING; SILICON SUBSTRATES;

SELF ASSEMBLY;

EID: 33750587280     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/11/002     Document Type: Article

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