Patterning of thin-film microstructures on non-planar substrate surfaces using decal transfer lithography

Advanced Materials

Volumn 16, Issue 15 SPEC. ISS., 2004, Pages 1323-1327

  Childs, William R ^a   Nuzzo, Ralph G ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; DELAMINATION; ELECTRONIC EQUIPMENT; LENSES; PHOTOLITHOGRAPHY; PLASMA ETCHING; PLASTIC DEFORMATION; PROFILOMETRY; REACTIVE ION ETCHING; SPUTTER DEPOSITION; SUBSTRATES; THIN FILMS;

COHESIVE MECHANICAL FAILURE (CMF); DECAL TRANSFER LITHOGRAPHY (DTL); PATTERNING; POLY(DIMETHYLSILOXANE) (PDMS);

MICROSTRUCTURE;

EID: 4544291829     PISSN: 09359648     EISSN: None     Source Type: Journal    
DOI: 10.1002/adma.200400592     Document Type: Article

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