Mechanical characteristics and its annealing effect of diamondlike-carbon nanosprings fabricated by focused-ion-beam chemical vapor deposition

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 23, Issue 6, 2005, Pages 2801-2805

  Nakamatsu, Ken Ichiro ^a,b   Nagase, Masao ^c   Igaki, Jun Ya ^a,b   Namatsu, Hideo ^c   Matsui, Shinji ^a,b  

^a UNIVERSITY OF HYOGO   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^c Kashino Diverse Brain Research Laboratory of NTT Communication Science Laboratories   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CHEMICAL VAPOR DEPOSITION; FOCUSING; ION BEAMS; NANOSTRUCTURED MATERIALS; OPTICAL MICROSCOPY; SPRINGS (COMPONENTS); STEEL; VACUUM;

COIL SPRINGS; FOCUSED-ION-BEAM CHEMICAL VAPOR DEPOSITION (FIB-CVD); NANOSPRINGS; SPRING CONSTANT;

DIAMOND LIKE CARBON FILMS;

EID: 29044444021     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2132329     Document Type: Article

References (12)

1. S. Matsui, T. Kaito, J. Fujita, M. Komuro, K. Kanda, and Y. Haruyama, J. Vac. Sci. Technol. B 18, 3181 (2000).
2. R. Kometani, T. Morita, K. Watanabe, K. Kanda, Y. Haruyama, T. Kaito, J. Fujita, M. Ishida, Y. Ochiai, and S. Matsui, Jpn. J. Appl. Phys., Part 1 42, 4107 (2003).
3. T. Morita, R. Kometani, K. Watanabe, K. Kanda, Y. Haruyama, T. Hoshino, K. Kondo, T. Kaito, T. Ichihashi, J. Fujita, M. Ishida, Y. Ochiai, and S. Matsui, J. Vac. Sci. Technol. B 21, 2731 (2003).
4. R. Kometani, T. Hoshino, K. Kondo, K. Kanda, Y. Haruyama, T. Kaito, J. Fujita, M. Ishida, and S. Matsui, Jpn. J. Appl. Phys., Part 2 43, 7187 (2004).
5. J. Fujita, M. Ishida, T. Sakamoto, Y. Ochiai, T. Kaito, and S. Matsui, J. Vac. Sci. Technol. B 19, 2834 (2001).
6. D.-L. Liu, D.-X. Ye, F. Khan, F. Tang, B.-K. Lim, R. C. Picu, G.-C. Wang, and T.-M. Lu, J. Nanosci. Nanotechnol. 3, 492 (2003).
7. G. Zhang and Y. Zhao, J. Appl. Phys. 95, 267 (2003).
8. J. P. Singh, D.-L. Liu, D.-X. Ye, R. C. Picu, T.-M. Lu, and G.-C. Wang, Appl. Phys. Lett. 84, 3657 (2003).
9. C. J. Ancker and J. N. Goodier, J. Appl. Mech. 25, 466 (1958).
10. Y. Seino and S. Nagai, J. Mater. Sci. Lett. 12, 324 (1993).
11. J. Fujita, M. Ishida, T. Ichihashi, T. Sakamato, Y. Ochiai, T. Kaito, and S. Matsui, Jpn. J. Appl. Phys., Part 2 41, 4423 (2002).
12. M. Ishida, J. Fujita, and Y. Ochiai, J. Vac. Sci. Technol. B 20, 2784 (2002).