Mass sensor for in situ monitoring of focused ion and electron beam induced processes

Applied Physics Letters

Volumn 90, Issue 5, 2007, Pages

  Friedli, Vinzenz ^a,b   Santschi, Christian ^c   Michler, Johann ^a   Hoffmann, Patrik ^b   Utke, Ivo ^a  

^a SWISS FEDERAL LABORATORIES FOR MATERIALS SCIENCE AND TECHNOLOGY   (Switzerland)

^b EPFL   (Switzerland)

^c CSEM   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC NOISE MEASUREMENT; DEPOSITION; ELECTRON BEAMS; ION BEAMS; NATURAL FREQUENCIES; THERMAL EFFECTS;

IN SITU MONITORING; MASS SENSOR; PHASE LOCKING; PIEZORESISTIVE CANTILEVER;

SENSORS;

EID: 33846982889     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2435611     Document Type: Article

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