Electron beam induced deposition of iron nanostructures

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 26, Issue 3, 2008, Pages 939-944

  Hochleitner, G ^a   Wanzenboeck, H D ^a   Bertagnolli, E ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

DISSOCIATION; ELECTRON BEAMS; ELECTRONIC STRUCTURE; GROWTH RATE; IRON COMPOUNDS;

CONFINED ELECTRONS; GROWTH MODES; NANOPILLARS; THREE-DIMENSIONAL STRUCTURES;

NANOSTRUCTURES;

EID: 44649100075     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2907781     Document Type: Article

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