Growth of three-dimensional nano-structures using FIB-CVD and its mechanical properties

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 206, Issue , 2003, Pages 472-477

  Fujita, J ^a   Ishida, M ^a   Ichihashi, T ^a   Ochiai, Y ^a   Kaito, T ^b   Matsui, S ^b,c  

^a NEC CORPORATION   (Japan)

^b SEIKO INSTRUMENTS INC   (Japan)

^c UNIVERSITY OF HYOGO   (Japan)

Author keywords

Amorphous; Carbon; CVD; Ga; Ion; Young's modulus

Indexed keywords

AMORPHOUS MATERIALS; CARBON; CHEMICAL VAPOR DEPOSITION; ELASTIC MODULI; ELECTRON IRRADIATION; GROWTH (MATERIALS); NANOSTRUCTURED MATERIALS;

AMORPHOUS CARBON; FOCUSED ION BEAMS (FIB);

ION BEAM ASSISTED DEPOSITION;

EID: 0038075206     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(03)00798-5     Document Type: Conference Paper

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