Measurement of mechanical resonance and losses in nanometer scale silicon wires

Applied Physics Letters

Volumn 75, Issue 7, 1999, Pages 920-922

  Carr, Dustin W ^a   Evoy, S ^a   Sekaric, L ^a   Craighead, H G ^a   Parpia, J M ^a  

^a Cornell University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0042760419     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.124554     Document Type: Article

References (16)

1. J. D. Zook, D. W. Burns, G. Guckel, J. J. Sniegowski, R. L. Engelstad, and Z. Feng, Sens. Actuators A 35, 51 (1992).
2. A. Prak, F. R. Blom, M. Elwenspoek, and T. S. J. Lammerink, Sens. Actuators A 25-27, 691 (1991).
3. C. Gui, R. Legtenberg, M. Elwenspoek, and J. H. Fluitman, J. Micromech. Microeng. 5, 183 (1995).
4. A. N. Cleland and M. L. Roukes, Nature (London) 392, 160 (1998).
5. H. A. C. Tilmans, M. Elwenspoek, and J. H. J. Fluitman, Sens. Actuators A 30, 35 (1992).
6. R. N. Kleiman, G. K. Kaminsky, J. D. Reppy, R. Pindak, and D. J. Bishop, Rev. Sci. Instrum. 56, 2088 (1985).
7. R. E. Mihailovich and J. M. Parpia, Phys. Rev. Lett. 68, 3052 (1992).
8. R. E. Mihailovich and N. C. MacDonald, Sens. Actuators A 50, 199 (1995).
9. D. W. Greywall, B. Yurke, P. A. Busch, and S. C. Arney, Europhys. Lett. 34, 37 (1996).
10. D. W, Carr and H. G. Craighead, J. Vac. Sci. Technol. B 16, 3821 (1998).
11. D. W. Carr and H. G. Craighead, J. Vac. Sci. Technol. B 15, 2760 (1997).
12. D. W. Carr and H. G. Craighead (unpublished).
13. A. N. Cleland and M. L. Roukes, Appl. Phys. Lett. 69, 2653 (1996).
14. A. N. Cleland and M. L. Roukes, Sens. Actuators A 72, 256 (1999).
15. B. Yurke, D. S. Greywall, A. N. Pargellis, and P. A. Busch, Phys. Rev. A 51, 4211 (1995).
16. D. S. Greywall, B. Yurke, P. A. Busch, A. N. Pargellis, and R. L. Willet, Phys. Rev. Lett. 72, 2992 (1994).