Surface effects and high quality factors in ultrathin single-crystal silicon cantilevers

Applied Physics Letters

Volumn 77, Issue 23, 2000, Pages 3860-3862

  Yang, Jinling ^a,b   Ono, Takahito ^a   Esashi, Masayoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b UNIVERSITY OF FREIBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000435875     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1330225     Document Type: Article

References (12)

1. G. Binning, C. F. Quate, and C. Gerber, Phys. Rev. Lett. 56, 930 (1986).
2. D. Rugar, O. Zuger, S. Hoen, C. S. Yannoni, H. M. Vieth, and R. D. Kendrick, Science 264, 1560 (1994).
3. T. D. Stowe, K. Yasumura, T. W. Kenny, D. Botkin, K. Wago, and D. Rugar, Appl. Phys. Lett. 71, 288 (1997).
4. T. R. Albrech, P. Grutter, D. Horne, and D. Rugar, J. Appl. Phys. 69, 668 (1991).
5. J. L. Yang, T. Ono, and M. Esashi, Sens, Actuators A 82, 102 (2000).
6. J. L. Yang, T. Ono, and M. Esashi, Proceedings of Micro Electro Mechanical System 2000, Miyazaki, Japan, 2000, pp. 235-240.
7. K. Y. Yasumura, T. D. Stowe, E. M. Chow, T. Pfafman, T. W. Kenny, and D. Rugar, Proceedings of Solid State Sensor and Actuator Workshop. South Carolina, 1998, pp. 65-70.
8. K. Y. Yasumura, T. D. Stowe, E. M. Chow, T. Pfafman, T. W. Kenny, B. C. Stipe, and D. Rugar, J. Microelectromech. Syst. 9, 117 (2000).
9. C. Cabuz, Ph.D thesis, Tohoku University, Sendai, 1994.
10. O. Marti, A. Ruf, M. Hipp, H. Bielefeldt, J. Colchero, and J. Mlynek, Ultramicroscopy 42-44, 345 (1992).
11. J. J. Boland, Phys. Rev. Lett. 65, 3325 (1990).
12. J. J. Boland Surf. Sci. 261, 17 (1992).