Investigating surface stress: Surface loss in ultrathin single-crystal silicon cantilevers

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 19, Issue 2, 2001, Pages 551-556

  Yang, Jinling ^a,b   Takahito, Ono ^a   Esashi, Masavoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b UNIVERSITY OF FREIBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

HEATING; SILICA; SILICON; SINGLE CRYSTALS; STRESSES; SURFACE STRUCTURE;

SURFACE LOSS; SURFACE STRESS; ULTRATHIN SINGLE CRYSTAL SILICON CANTILEVER;

SURFACE PROPERTIES;

EID: 0343831939     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1347040     Document Type: Article

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