Recent advances in polishing of advanced materials

Materials and Manufacturing Processes

Volumn 23, Issue 5, 2008, Pages 449-456

  Zhong, Z W ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Abrasive flow machining; Advanced materials; Beams; Brittle materials; Chemical mechanical polishing; Curved surfaces; Electrorheological fluid; Friction; Magnetic fluid; Modeling; Polishing mechanisms; Polishing processes; Robotic polishing; Simulation

Indexed keywords

BRITTLENESS; CHEMICAL FINISHING; CHEMICAL MECHANICAL POLISHING; COMPUTER CONTROL SYSTEMS; ELECTRORHEOLOGICAL FLUIDS; FLUIDS; FRICTION; LATTICE VIBRATIONS; MAGNETIC FLUIDS; MAGNETIC MATERIALS; MECHANISMS; NANOTECHNOLOGY; POLISHING; RHEOLOGY; ROBOTICS; VIBRATIONS (MECHANICAL);

ADVANCED MATERIALS; AUTOMATIC POLISHING; BRITTLE MATERIALS; CHEMICAL-MECHANICAL POLISHING (CMP); COMPUTERIZED NUMERICAL CONTROL (CNC) MACHINES; CURVED SURFACES; ELECTRORHEOLOGICAL (ER); JOURNAL ARTICLES; MAGNETIC (CE); NONCONTACT (NC); POLISHING PROCESSES; ROBOTIC POLISHING;

CHEMICAL POLISHING;

EID: 46149125981     PISSN: 10426914     EISSN: 15322475     Source Type: Journal    
DOI: 10.1080/10426910802103486     Document Type: Article

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