Chemical mechanical polishing of PZT thin films for FRAM applications

Microelectronic Engineering

Volumn 83, Issue 11-12, 2006, Pages 2238-2242

  Seo, Yong Jin ^a   Park, Jin Seong ^b   Woo Sun Lee, ^b  

^a Daebul University   (South Korea)

^b Chosun University   (South Korea)

Author keywords

Chemical mechanical polishing; Ferroelectric random access memory; Pb1.1(Zr0.52Ti0.48)O3; Sol gel

Indexed keywords

CHEMICAL MECHANICAL POLISHING; PH EFFECTS; PIEZOELECTRIC MATERIALS; RANDOM ACCESS STORAGE; SLURRIES; SOL-GELS; SURFACE ROUGHNESS;

FERROELECTRIC FILMS; FERROELECTRIC RANDOM ACCESS MEMORY; REMOVAL RATE;

THIN FILMS;

EID: 33751256583     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.10.011     Document Type: Article

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