Investigation of thermo-chemical polishing of CVD diamond film

Key Engineering Materials

Volumn 329, Issue , 2007, Pages 195-200

  Chou, W C ^a   Chao, C L ^a   Chien, H H ^b   Ma, K J ^c   Lin, H Y ^d  

^a TAMKANG UNIVERSITY   (Taiwan)

^b CHUNG HUA UNIVERSITY   (Taiwan)

^c INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

^d NONE

Author keywords

Chemical vapor deposition; Diamond film; Thermo chemical polishing

Indexed keywords

CHEMICAL POLISHING; DIAMONDS; SINGLE CRYSTALS; ZINC OXIDE;

DIAMOND FILM; POLISHING SPEED; THERMO-CHEMICAL POLISHING;

CHEMICAL VAPOR DEPOSITION;

EID: 33846330137     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: 10.4028/0-87849-416-2.195     Document Type: Article

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