A study of basic characteristics of polishing using particle-type electro-rheological fluid

Key Engineering Materials

Volumn 329, Issue , 2007, Pages 201-206

  Tanaka, Takeshi ^a  

^a NONE   (Japan)

Author keywords

Copper; One sided pattern electrodes; Particle type electro rheological fluid; Polishing; Surface roughness

Indexed keywords

ABRASIVES; COPPER; ELECTRIC POTENTIAL; ELECTRODES; RHEOLOGY; SURFACE ROUGHNESS;

ONE-SIDED PATTERN ELECTRODES; PARTICLE-TYPE ELECTRO-RHEOLOGICAL FLUID; WORKPIECE;

CHEMICAL POLISHING;

EID: 33846327568     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: 10.4028/0-87849-416-2.201     Document Type: Article

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