An analytical model of the material removal rate between elastic and elastic-plastic deformation for a polishing process

International Journal of Advanced Manufacturing Technology

Volumn 32, Issue 7-8, 2007, Pages 675-681

  Lin, Tsann Rong ^a  

^a NATIONAL FORMOSA UNIVERSITY   (Taiwan)

Author keywords

Material removal rate; Micro contact mechanics; Polishing

Indexed keywords

ELASTIC MODULI; ELASTOPLASTICITY; MATHEMATICAL MODELS; MICROMECHANICS; POLISHING; REMOVAL; SURFACE ROUGHNESS;

MATERIAL REMOVAL RATE; MICRO-CONTACT MECHANICS; SLURRY PARTICLES;

MATERIALS SCIENCE;

EID: 33947220921     PISSN: 02683768     EISSN: 14333015     Source Type: Journal    
DOI: 10.1007/s00170-005-0391-4     Document Type: Article

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