Polishing of quartz by rapid etching in ammonium bifluoride

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 54, Issue 7, 2007, Pages 1454-1462

  Vallin, Örjan ^a   Danielsson, Rolf ^b   Lindberg, Ulf ^a   Thornell, Greger ^a  

^a UPPSALA UNIVERSITY   (Sweden)

^b UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

AMMONIUM COMPOUNDS; DATA REDUCTION; POLISHING; QUARTZ; SURFACE ROUGHNESS;

AMMONIUM BIFLUORIDE; ETCH RATE; PARAMETER SPACES; RAPID ETCHING;

ETCHING;

EID: 34547452072     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2007.406     Document Type: Article

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