Advanced surface polishing using gas cluster ion beams

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 261, Issue 1-2 SPEC. ISS., 2007, Pages 664-668

  Insepov, Z ^a   Hassanein, A ^a   Norem, J ^a   Swenson, D R ^b  

^a ARGONNE NATIONAL LABORATORY   (United States)

^b Epion Corporation   (United States)

Author keywords

GCIB; Grain boundaries; rf Cavity breakdown; Surface smoothening

Indexed keywords

GAS CLUSTER ION BEAMS; GCIB; RF-CAVITY BREAKDOWN; SURFACE SMOOTHENING;

GRAIN BOUNDARIES; SUPERCONDUCTING DEVICES; SURFACE PHENOMENA; SURFACE TREATMENT;

ION BEAMS;

EID: 34447272733     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2007.04.134     Document Type: Article

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