Investigation of ionized metal flux in enhanced high power impulse magnetron sputtering discharges

Journal of Applied Physics

Volumn 115, Issue 15, 2014, Pages

  Stranak, Vitezslav ^a   Hubicka, Zdenek ^b   Cada, Martin ^b   Drache, Steffen ^c   Tichy, Milan ^c   Hippler, Rainer ^c  

^a UNIVERSITY OF SOUTH BOHEMIA   (Czech Republic)

^b INSTITUTE OF PHYSICS   (Czech Republic)

^c CHARLES UNIVERSITY   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

LASER PRODUCED PLASMAS; MAGNETRON SPUTTERING; MASS SPECTROMETRY; METAL IONS; METALS;

COMPLEMENTARY METHODS; ELECTRON CYCLOTRON WAVE RESONANCES; ENERGY-RESOLVED MASS SPECTROMETRY; HIGH POWER IMPULSE MAGNETRON SPUTTERING (HIPIMS); ION CONTRIBUTIONS; LOWER PRESSURES; PRE-IONIZATION; SECONDARY ELECTRON EMISSIONS;

IONIZATION OF GASES;

EID: 84899839301     PISSN: 00218979     EISSN: 10897550     Source Type: Journal    
DOI: 10.1063/1.4871635     Document Type: Article

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