Preionised pulsed magnetron discharges for ionised physical vapour deposition

Journal of Optoelectronics and Advanced Materials

Volumn 7, Issue 5, 2005, Pages 2481-2484

  Ganciu, M ^a,b,c   Konstantinidis, S ^b   Paint, Y ^b   Dauchot, J P ^b   Hecq, M ^b   De Poucques, L ^a   Vasina P ^a,d   Mesko M ^a,d   Imbert, J C ^a   Bretagne, J ^a   Touzeau, M ^a  

^a UNIVERSITÉ PARIS SUD   (France)

^b MATERIA NOVA RESEARCH CENTER   (Belgium)

^c NATIONAL INSTITUTE FOR LASER   (Romania)

^d MASARYK UNIVERSITY   (Czech Republic)

Author keywords

Preionization; Pulsed magnetron; Transport processes

Indexed keywords

ELECTRIC ARCS; IONIZATION; MAGNETRONS;

CURRENT PULSE; IONISED PHYSICAL VAPOUR DEPOSITIONS; MAGNETRON DISCHARGES; PRE-IONIZATION; PULSED MAGNETRON DISCHARGES; RF DISCHARGE; THIN-FILM DEPOSITIONS; TRANSPORT PROCESS;

PHYSICAL VAPOR DEPOSITION;

EID: 27844467175     PISSN: 14544164     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

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