Determination of titanium temperature and density in a magnetron vapor sputtering device assisted by two microwave coaxial excitation systems

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 22, Issue 1, 2004, Pages 192-200

  Leroy, O ^a   De Poucques, L ^a   Boisse Laporte, C ^a   Ganciu, M ^a,b   Teule Gay L ^a   Touzeau, M ^a  

^a UNIVERSITÉ PARIS SACLAY   (France)

^b NATIONAL INSTITUTE FOR LASER   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

DENSITY (SPECIFIC GRAVITY); IONIZATION; LIGHT ABSORPTION; MICROWAVES; PRESSURE EFFECTS; SPECTROSCOPY; TEMPERATURE; TITANIUM;

MAGNETRON VAPOR SPUTTERING DEVICES; MICROWAVE COAXIAL EXCITATION SYSTEMS;

MAGNETRON SPUTTERING;

EID: 1242329416     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1635391     Document Type: Article

References (25)

1. S. M. Rossnagel and J. Hopwood, J. Vac. Sci. Technol. B 12, 449 (1994).
2. S. M. Rossnagel and J. Hopwood, Appl. Phys. Lett. 63, 3285 (1993).
3. S. M. Rossnagel, J. Vac. Sci. Technol. B 16, 2585 (1998).
4. J. Hopwood, Phys. Plasmas 5, 1624 (1998).
5. D. Mao, K. Tao, and J. Hopwood, J. Vac. Sci. Technol. A 20, 379 (2002).
6. G. Zhong and J. Hopwood, J. Vac. Sci. Technol. B 17, 405 (1999).
7. Y. Andrew, I. Abraham, J. H. Booske, Z. C. Lu, and A. E. Wendt, J. Appl. Phys. 88, 3208 (2000).
8. M. M. C. Allain, D. B. Hayden, D. R. Juliano, and D. N. Ruzic, J. Vac. Sci. Technol. A 18, 797 (2000).
9. D. B. Hayden, D. R. Juliano, M. N. Neumann, M. C. Allain, and D. N. Ruzic, Surf. Coat. Technol. 120, 401 (1999).
10. A. Ricard, C. Nouvellon, S. Konstantinidis, J. P. Dauchot, M. Wautelet, and M. Hecq, J. Vac. Sci. Technol. A 20, 1488 (2002).
11. J. Lu and M. J. Kushner, J. Appl. Phys. 87, 7198 (2000).
12. J. Lu and M. J. Kushner, Plasma Sources Sci. Technol. 10, 502 (2001).
13. J. Lu and M. J. Kushner, J. Vac. Sci. Technol. A 19, 2652 (2001).
14. J. Lu and M. J. Kushner, J. Appl. Phys. 89, 878 (2001).
15. K. Tao, D. Mao, and J. Hopwood, J. Appl. Phys. 91, 4040 (2002).
16. C. Boisse-Laporte, O. Leroy, L. De Poucques, L. Teulé-Gay, J. H. A. Hagelaar, N. Kouassi, D. Pagnon, L. Alvès, P. Leprince, J. Bretagne, and M. Touzeau, Le Vide: Science, Technique et Applications 304, 272 (2002).
17. C. Boisse-Laporte, O. Leroy, L. De Poucques, B. Agius, J. Bretagne, M. C. Hugon, L. Teulé-Gay, and M. Touzeau, Surf. Coat. Technol. (in press).
18. Perkin-Elmer web site: http://www.perkin-elmer.com
19. M. Ganciu (private communication).
20. D. Ohebsian, N. Sadeghi, C. Trassy, and J. M. Mertnet, Opt. Commun. 32, 81 (1981).
21. A. Ricard (private communication).
22. NIST Atomic Database web site: http://physics.nist.gov/cgi-bin/AtData/ main_asd
23. A. G. G. Mitchell and M. W. Zemanski, Resonance Radialion and Excited Atoms (Cambridge University Press, Cambridge, 1934).
24. C. Fourrier, Thèse d'état, Université de Nantes, 1981.
25. G. M. Turner, I. S. Falconer, B. W. James, and D. R. McKenzie, J. Appl. Phys. 65, 3671 (1989).