Self-organization and self-limitation in high power impulse magnetron sputtering

Applied Physics Letters

Volumn 100, Issue 22, 2012, Pages

  Anders, André ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DENSITY GRADIENTS; ELECTRON CONFINEMENT; HIGH POWER IMPULSE MAGNETRON SPUTTERING (HIPIMS); NEGATIVE FEEDBACK MECHANISM; POWER DENSITIES; PRIMARY IONS; SECONDARY ELECTRONS;

ELECTRIC FIELDS; MAGNETRON SPUTTERING; PLASMA CONFINEMENT;

IONIZATION;

EID: 84862145217     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4724205     Document Type: Article

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