Alfvéns critical ionization velocity observed in high power impulse magnetron sputtering discharges

Physics of Plasmas

Volumn 19, Issue 9, 2012, Pages

  Brenning, N ^a   Lundin, D ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

DENSE PLASMA; DRIFT VELOCITIES; ELECTRON ENERGIZATION; HIGH POWER IMPULSE MAGNETRON SPUTTERING (HIPIMS); IONIZATION VELOCITY; PLASMA BUILDUP; RESEARCH FIELDS; THIN-FILM DEPOSITIONS;

IONIZATION;

MAGNETRON SPUTTERING;

EID: 84867019687     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4752073     Document Type: Article

References (44)

1. H. Alfven, On the Cosmogony of the Solar System, Stockholms Observatoriums Annaler, 14 (1942).
2. H. Alfven, On the Origin of the Solar System (Clarendon, Oxford, 1954).
3. B. Angerth, L. Block, U. Fahleson, and K. Soop, Experiments with partly ionized rotating plasmas., Nucl. Fusion Suppl., pt 1, 39-46 (1962).
4. A. A. Galeev, Weak turbulence theory of enhanced gas ionization by the plasma flow., in Proceedings of an International School and Workshop Aon Plasma Astrophysics, Varenna, ES SP-171, 1981, pp. 77-82.
5. K. Papadopoulos, On the shuttle glow (the plasma alternative)., Radio Sci. 19, 571-577 (1984). 10.1029/RS019i002p00571
6. J. C. Sherman, Review of the critical velocity of gas-plasma interaction II: Theory., Astrophys. Space Sci. 24, 487-510 (1973). 10.1007/BF02637169
7. E. Mobius, Critical velocity experiments in space., in Active Experiments in Space, Symposium in Alpbach, 24-28 May 1983, ESA SP-195, 215-226, 1983.
8. P. T. Newell, Review of the critical ionization velocity effect in space., Rev. Geophys. 23 (1), 93-104, doi: 10.1029/RG023i001p00093 (1985).
9. N. Brenning, Review of the CIV phenomenon., Space Sci. Rev. 59, 209-314 (1992). 10.1007/BF00242088
10. G. Haerendel, Alfvéns critical velocity effect tested in space., Z. Naturforsch. 37a, 728 (1982).
11. J. Eninger, Experimental investigations of an ionizing wave in crossed electric and magnetic fields., in Proceedings of 7th International Conference on Phenomena in Ionized Gases, Belgrade (1966), Vol. 1, p. 520.
12. A. Kozyrev, N. Sochugov, K. Oskomov, A. Zakharov, and A. Odivanova, Plasma Phys. Rep. 37, 621 (2011). 10.1134/S1063780X11060122
13. A. P. Ehiasarian, A. Hecimovic, T. de los Arcos, R. New, V. Sculz-von der Gathen, M. Boke, and J. Winter, High Power impulse magnetron sputtering discharge: instabilities and self-organization., Appl. Phys. Lett. 100, 114101 (2012). 10.1063/1.3692172
14. J. Anderson and A. Anders, Appl. Phys. Lett. 92, 221503 (2008). 10.1063/1.2938414
15. U. Helmerson, M. Lattemann, J. Bohlmark, A. P. Ehiasarian, and J. T. Gudmundsson, Thin Solid Films 513, 1 (2006). 10.1016/j.tsf.2006.03.033
16. K. Sarakinos, J. Alami, and S. Konstantinidis, Surf. Coat. Technol. 204 (11), 1661-1684 (2010) 10.1016/j.surfcoat.2009.11.013.
17. J. T. Gudmundsson, N. Brenning, D. Lundin, and U. Helmersson, High power impulse sputtering discharge., J. Vac. Sci. Technol. A 30 (3), 030801 (2012). 10.1116/1.3691832
18. A. Anders, P. Ni, and A. Rauch, Drifting localization of ionization runaway: Unraveling the nature of anomalous transport in high power impulse magnetron sputtering., J. Appl. Phys. 111, 053304 (2012). 10.1063/1.3692978
19. D. Lundin and K. Sarakinos, J. Mater. Res. 27, 780 (2012). 10.1557/jmr.2012.8
20. U. V. Fahleson, Experiments with plasma moving through neutral gas., Phys. Fluids 4, 123-127 (1961). 10.1063/1.1706172
21. I. Axnas, Experimental Comparison of the Critical Ionization Velocity in Atomic and Molecular Gases (Royal Institute of Technology, Stockholm, Sweden, 1978), TRITA-EPP-78-04.
22. G. Himmel and A. Piel, The velocity limitation in a rotating plasma of the homopolar type., J. Phys. D: Appl. Phys. 6, L108-L111 (1973). 10.1088/0022-3727/6/12/102
23. G. Himmel, E. Mobius, and A. Piel, Investigation of the structure and the plasma parameters in a critical velocity' rotating plasma., Z. Naturforsch. 31a, 934-941 (1976).
24. G. Himmel, E. Mobius, and A. Piel, Investigation of the particle velocities in a Critical Velocity' rotating plasma., Z. Naturforsch. 32a, 577-579 (1977).
25. E. Mobius, A. Piel, and G. Himmel, Z. Naturforsch. 34a, 405 (1979).
26. L. Nickenig and A. Piel, Direct observations of high frequency emissions from a critical velocity rotating plasma, Report 97-N4-160, Institut fur Experimentalphysik II der Ruhr-Universitat Bochum, Germany, 1997.
27. V. Kouznetsov, K. Macák, J. M. Schneider, U. Helmerson, and I. Petrov, Surf. Coat. Technol. 122, 290 (1999). 10.1016/S0257-8972(99)00292-3
28. J. Bohlmark, J. Alami, C. Christou, A. P. Ehiasarian, and U. Helmersson, J. Vac. Sci. Technol. A 23, 18 (2005). 10.1116/1.1818135
29. J. T. Gudmundsson, P. Sigurjonsson, P. Larsson, D. Lundin, and U. Helmersson, J. Appl. Phys. 105, 123302 (2009). 10.1063/1.3151953
30. J. Bohlmark, J. T. Gudmundsson, J. Alami, M. Lattemann, and U. Helmersson, IEEE Trans. Plasma Sci. 33, 346 (2005). 10.1109/TPS.2005.845022
31. C. Huo, M. A. Raadu, D. Lundin, J. T. Gudmundsson, A. Anders, and N. Brenning, Gas rarefaction and the time evolution of long high power impulse magnetron sputtering pulses., Plasma Sources Sci. Technol. 21, 045004 (2012). 10.1088/0963-0252/21/4/045004
32. I. Axnas, Velocity limitations in coaxial plasma gun experiments with gas mixtures., Astrophys. Space Sci. 55, 139-146 (1978). 10.1007/BF00642585
33. M. A. Raadu, The Critical Ionization Mechanism for the Case of Gas Mixtures (Royal Institute of Technology, Stockholm, 1982), TRITA-EPP-82-10.
34. J. C. Sherman, Some Theoretical Aspects of the Interaction between a Plasma Stream and a Neutral Gas in a Magnetic Field (Royal Institute of Technology, Stockholm, 1969), TRITA-EPP-69-29.
35. A. A. Galeev, Weak turbulence theory of enhanced gas ionization by plasma flows., in Proceedings of an International School and Workshop on Plasma Astrophysics (Varenna, 1981), ESA SP-171, pp. 77-82.
36. M. Tanaka, and K. Papadopoulos, Creation of high energy electron tails by means of the modified two-stream instability., Phys. Fluids 26, 1697 (1983). 10.1063/1.864368
37. T. Abe and S. Machida, Production of high-energy electrons caused by counter streaming ion beams in an external magnetic field., Phys. Fluids 28, 1178 (1985). 10.1063/1.865043
38. I. Axnäs, Anomalous Cross-Field Velocities in a CIV Laboratory Experiment (Royal Institute of Technology, Stockholm 1988), TRITA-EPP-88-06.
39. D. Lundin, U. Helmersson, S. Kirkpatrick, S. Rhode, and N. Brenning, Anomalous electron transport in high power impulse sputtering magnetrons., Plasma Sources Sci. Technol. 17, 025007(9pp) (2008). 10.1088/0963-0252/17/2/ 025007
40. A. Piel, E. Möbius, and G. Himmel, Astrophys. Space Sci. 72, 211-221 (1980). 10.1007/BF00642180
41. J. A. Thornton, J. Vac. Sci. Technol. 15, 171 (1978). 10.1116/1.569448
42. D. Depla, S. Mahiey, and R. De Gryse, Thin Solid Films 517, 2825-39 (2009). 10.1016/j.tsf.2008.11.108
43. M. A. Raadu, I. Axnäs, J. T. Gudmundsson, C. Huo, and N. Brenning, Plasma Sources Sci. Technol. 20, 65007 (2011). 10.1088/0963-0252/20/6/065007
44. N. Brenning, C. Huo, D. Lundin, M. A. Raadu, C. Vitelaru, G. D. Stancu, T. Minea, and U. Helmersson, Plasma Sources Sci. Technol. 21, 025005 (9pp) (2012). 10.1088/0963-0252/21/2/025005