Energy dependence of ion-induced sputtering yields from monatomic solids at normal incidence

Atomic Data and Nuclear Data Tables

Volumn 62, Issue 2, 1996, Pages 149-253

  Yamamura, Yasunori ^a,b   Tawara, Hiro ^a  

^a NATIONAL INSTITUTE FOR FUSION SCIENCE   (Japan)

^b OKAYAMA UNIVERSITY OF SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

INTELLIGENT SYSTEMS; IONS; SPUTTERING;

DATAPOINTS; ENERGY DEPENDENCE; INCIDENT IONS; ION ENERGIES; ION TARGETS; ION-INDUCED SPUTTERING; MONTE CARLO'S SIMULATION; NORMAL INCIDENCE; SIMULATION CODE; SPUTTERING YIELDS;

MONTE CARLO METHODS;

EID: 0030096316     PISSN: 0092640X     EISSN: None     Source Type: Journal    
DOI: 10.1006/adnd.1996.0005     Document Type: Article

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