Time-Resolved Diagnostics of Dual High Power Impulse Magnetron Sputtering With Pulse Delays of 15 μs and 500 μs

Contributions to Plasma Physics

Volumn 51, Issue 2-3, 2011, Pages 237-245

  Stranak, V ^a   Drache, S ^a   Cada, M ^b   Hubicka, Z ^b   Tichy, M ^c   Hippler, R ^a  

^a UNIVERSITY OF GREIFSWALD   (Germany)

^b INSTITUTE OF PHYSICS   (Czech Republic)

^c CHARLES UNIVERSITY   (Czech Republic)

Author keywords

Langmuir probe; Magnetron sputtering; Optical emission spectroscopy; Time resolved plasma diagnostics

Indexed keywords

CATHODES; ELECTRIC DISCHARGES; ELECTRON ENERGY LEVELS; LANGMUIR PROBES; MAGNETRON SPUTTERING; PLASMA DIAGNOSTICS;

ELECTRON ENERGY FLUX; HIGH POWER; MAGNETIC FIELD CONFIGURATIONS; MAGNETRON-SPUTTERING; ON-ELECTRON DENSITY; OPTICAL-EMISSION SPECTROSCOPY; PULSE DELAY; TIME RESOLVED MEASUREMENT; TIME-RESOLVED; TIME-RESOLVED PLASMA DIAGNOSTICS;

OPTICAL EMISSION SPECTROSCOPY;

EID: 79952725048     PISSN: 08631042     EISSN: 15213986     Source Type: Journal    
DOI: 10.1002/ctpp.201000065     Document Type: Article

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