Energy flux measurements in high power impulse magnetron sputtering

Journal of Physics D: Applied Physics

Volumn 42, Issue 18, 2009, Pages

  Lundin, Daniel ^a   Stahl, Marc ^b   Kersten, Holger ^b   Helmersson, Ulf ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

^b UNIVERSITY OF KIEL   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANOMALOUS TRANSPORT; AVERAGE POWER; AXIAL FLUX; CHARGED SPECIES; DIRECT CURRENT MAGNETRON SPUTTERING; ENERGETIC SPECIES; ENERGY FLUX MEASUREMENTS; ENERGY FLUXES; HIGH-POWER; PULSED SPUTTERING; RADIAL FLUX; SUBSTRATE HEATING; THEORETICAL CALCULATIONS; THERMAL PROBE; TOTAL ENERGY FLUX;

ELECTRIC DISCHARGES; HEATING; PLASMAS;

MAGNETRONS;

EID: 70149094287     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/42/18/185202     Document Type: Article

References (21)

1. Thornton J A 1974 J. Vac. Sci. Technol. 11 666
2. Kersten H, Deutsch H, Steffen H, Kroesen G M W and Hippler R 2001 Vacuum 63 385
3. Li W, Ma Z Q, Wang Y and Wang D M 2006 Chin. Phys. Lett. 23 178
4. Petrov I, Adibi F, Greene J E, Hultman L and Sundgren J-E 1993 Appl. Phys. Lett. 63 36
5. Petrov I, Barna P B, Hultman L and Greene J E 2003 J. Vac. Sci. Technol. A 21 S117
6. Han J G 2009 J. Phys. D: Appl. Phys. 42 043001
7. Helmersson U, Lattemann M, Bohlmark J, Ehiasarian A P and Gudmundsson J T 2006 Thin Solid Films 513 1
8. Bohlmark J, Lattemann M, Gudmundsson J T, Ehiasarian A P, Aranda Gonzalvo Y, Brenning N and Helmersson U 2006 Thin Solid Films 515 1522
9. Lundin D, Larsson P, Wallin E, Lattemann M, Brenning N and Helmersson U 2008 Plasma Sources Sci. Technol. 17 035021
10. Alami J, Persson P O, Music D, Gudmundsson J T, Bohlmark J and Helmersson U 2005 J. Vac. Sci. Technol. A 23 278
11. Brenning N, Axnäs I, Raadu M A, Lundin D and Helmerson U 2008 Plasma Sources Sci. Technol. 17 045009
12. Thornton J A 1978 Thin Solid Films 54 23
13. Wolter M, Stahl M and Kersten H 2009 Vacuum 83 768
14. Ohring M 2002 Materials Science of Thin Films (San Diego, CA: Academic Press) p 748
15. Data sheet: http://www2.dupont.com/Kapton/en-US/assets/downloads/pdf/E-H- 78305.pdf accessed 20 March 2009 - ref-separator -
16. Kersten H, Rohde D, Berndt J, Deutsch H and Hippler R 2000 Thin Solid Films 377-378 585
17. Bohlmark J, Helmersson U, VanZeeland M, Axnäs I, Alami J and Brenning N 2004 Plasma Sources Sci. Technol. 13 654
18. Lundin D, Helmersson U, Kirkpatrick S, Rohde S and Brenning N 2008 Plasma Sources Sci. Technol. 17 025007
19. Rossnagel S M and Kaufman H R 1987 J. Vac. Sci. Technol. A 5 2276
20. Bradley J W, Thompson S and Aranda Gonzalvo Y 2001 Plasma Sources Sci. Technol. 10 490
21. Sigurjonsson P 2008 Spatial and Temporal Variation of the Plasma Parameters in a High Power Impulse Magnetron Sputtering (HiPIMS) Discharge (Reykjavik: Faculty of Engineering, University of Iceland)