Measurement of ionic and neutral densities in amplified magnetron discharges by pulsed absorption spectroscopy

Journal of Applied Physics

Volumn 95, Issue 5, 2004, Pages 2900-2905

  Konstantinidis, S ^a   Ricard, A ^b   Ganciu, M ^c   Dauchot, J P ^a   Ranea, C ^d   Hecq, M ^a  

^a UNIVERSITY OF MONS   (Belgium)

^b UNIVERSITÉ DE TOULOUSE   (France)

^c INSTITUTE OF ATOMIC PHYSICS   (Romania)

^d UNIVERSITY POLITEHNICA OF BUCHAREST   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; AMPLIFICATION; CATHODES; DEPOSITION; GROUND STATE; IONIZATION; MAGNETRON SPUTTERING; MAGNETRONS; OPTIMIZATION; THIN FILMS; TITANIUM;

MAGNETRON DISCHARGES; METASTABLE STATES;

ELECTRIC DISCHARGES;

EID: 1642307922     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1646452     Document Type: Article

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