Plasma flares in high power impulse magnetron sputtering

Applied Physics Letters

Volumn 101, Issue 22, 2012, Pages

  Ni, Pavel A ^a   Hornschuch, Christian ^a   Panjan, Matjaž ^a   Anders, André ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FAST CAMERAS; HIGH POWER IMPULSE MAGNETRON SPUTTERING (HIPIMS);

ELECTRIC FIELDS;

PLASMAS;

EID: 84870565312     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4768925     Document Type: Article

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