Drifting localization of ionization runaway: Unraveling the nature of anomalous transport in high power impulse magnetron sputtering

Journal of Applied Physics

Volumn 111, Issue 5, 2012, Pages

  Anders, Andŕ ^a   Ni, Pavel ^a   Rauch, Albert ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANOMALOUS TRANSPORT; AZIMUTHAL ELECTRIC FIELDS; BACKGROUND GAS; DENSE PLASMA; DRIFT VELOCITIES; HIGH POWER IMPULSE MAGNETRON SPUTTERING (HIPIMS); HIGH-ENERGY ELECTRON; IONIZATION INSTABILITY; MAGNETIZED ELECTRONS; PLASMA DENSITY GRADIENT; STOPPING POWER;

ELECTRIC FIELDS; ELECTRONS; KRYPTON; PLASMA DENSITY; PLASMAS;

IONIZATION OF GASES;

EID: 84858957818     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3692978     Document Type: Article

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