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Journal of Physics D: Applied Physics

Volumn 45, Issue 32, 2012, Pages

Ionized metal flux fraction measurements in HiPIMS discharges

(4) Poolcharuansin, P a Bowes, M a Petty, T J a Bradley, J W a

a UNIVERSITY OF LIVERPOOL (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CONTROL METHODS; DISCHARGE POWER; FRACTION MEASUREMENTS; HIGH POWER IMPULSE MAGNETRON SPUTTERING (HIPIMS); METAL FLUXES; PULSE FREQUENCIES; PULSEWIDTHS; TARGET VOLTAGE; TIME-AVERAGED; TITANIUM TARGETS;

METAL IONS; TITANIUM;

IONIZATION;

EID: 84864448456 PISSN: 00223727 EISSN: 13616463 Source Type: Journal
DOI: 10.1088/0022-3727/45/32/322001 Document Type: Article

Times cited : (35)

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