Origin of the delayed current onset in high-power impulse magnetron sputtering

IEEE Transactions on Plasma Science

Volumn 38, Issue 11 PART 1, 2010, Pages 3028-3034

  Yushkov, Georgy Yu ^a   Anders, André ^b  

^a INSTITUTE OF HIGH CURRENT ELECTRONICS   (Russian Federation)

^b LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

discharge; Electric breakdown; ionization; sputtering

Indexed keywords

APPLIED VOLTAGES; CURRENT AMPLITUDE; CURRENT PULSE; DELAY TIME; DISCHARGE; FREE PATH; GAS PRESSURES; HIGH-POWER; ION MOTIONS; LOW PRESSURES; MAGNETIZED ELECTRONS; PROPORTIONALITY FACTORS; PULSE DURATIONS; PULSE REPETITION RATES; SECONDARY ELECTRON EMISSIONS; TIME LAG;

ELECTRIC BREAKDOWN; IONIZATION OF GASES; JITTER; PARTICLE DETECTORS;

PULSE REPETITION RATE;

EID: 78349304875     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2010.2063041     Document Type: Conference Paper

References (19)

1. V. Kouznetsov, K. Macak, J. M. Schneider, U. Helmersson, and I. Petrov, "A novel pulsed magnetron sputter technique utilizing very high target power densities, " Surf. Coat. Technol., vol. 122, no. 2/3, pp. 290-293, Dec. 1999.
2. A. Ehiasarian, "Fundamentals and applications of HiPIMS, " in Plasma Surface Engineering Research and Its Practical Applications, R. Wei, Ed. Kerala, India: Res. Signpost, 2008, pp. 35-86.
3. A. Anders, J. Andersson, and A. Ehiasarian, "High power impulse magnetron sputtering: Current-voltage-time characteristics indicate the onset of sustained self-sputtering, " J. Appl. Phys., vol. 102, no. 11, pp. 113 303-1-113 303-11, Dec. 2007.
4. F. Paschen, "Ueber die zum Funkenübergang in Luft, Wasserstoff und Kohlensöure bei verschiedenen Drucken erforderliche Potentialdifferenz, " Wiedemann's Annalen der Physik und Chemie (Neue Serie), vol. 37, pp. 69-96, 1889.
5. J. S. Townsend, Electricity in Gases. Oxford, U. K.: Oxford Univ. Press, 1914.
6. F. M. Penning, "The starting potential of the glow discharge in neon argon mixtures between large parallel plates: II. Discussion of the ionisation and excitation by electrons and metastable atoms, " Physica, vol. 1, no. 7-12, pp. 1028-1044, May 1934.
7. A. A. Kruithof and F. M. Penning, "Determination of the Townsend ionization coefficient α for pure argon, " Physica, vol. 3, no. 6, pp. 515-533, Jun. 1936.
8. C. Ramsauer and R. Kollath, "Über den Wirkungsquerschnitt der Edelgasmoleküle gegenüber Elektronen unterhalb 1 Volt., " Ann. Phys. (Leipzig), vol. 395, no. 4, pp. 536-564, 1929.
9. J. M. Meek and J. D. Craggs, Electrical Breakdown of Gases. Oxford, U. K.: Clarendon, 1953.
10. F. Llewellyn-Jones, Ionization and Breakdown in Gases. London, U. K.: Methuen Co., 1957.
11. H. M. P. Stock, H. A. Blevin, and J. Fletcher, "Prebreakdown current growth in crossed electric and magnetic fields at low gas pressures: III. Temporal growth of current, " J. Phys. D, Appl. Phys., vol. 7, no. 4, pp. 635-646, Mar. 1974.
12. C. A. Maluckov, J. P. KaraMarkovic, and M. K. Radovic, "Statistical analysis of electrical breakdown time delay distributions in neon tube at 13.3 mbar, " IEEE Trans. Plasma Sci., vol. 31, no. 6, pp. 1344-1348, Dec. 2003.
13. Y. P. Raizer, Gas Discharge Physics. Berlin, Germany: Springer-Verlag, 1991.
14. M. Steenbeck, "The transient course of the ignition of a glow discharge, " Wiss. Veröff. Siemens-Konzern, vol. 9, pp. 42-72, 1930.
15. R. Schade, "Über die Aufbauzeit einer Glimmentladung, " Zeitschrift für Physik, vol. 104, pp. 487-510, 1937.
16. M. J. Druyvesteyn and F. M. Penning, "The mechanism of electrical discharges in gases of low pressure, " Rev. Mod. Phys., vol. 12, no. 2, pp. 87-174, Apr. 1940.
17. F. F. Chen, Plasma Physics and Controlled Fusion. New York: Plenum, 1984.
18. R. S. Freund, R. C. Wetzel, R. J. Shul, and T. R. Hayes, "Cross-section measurements for electron impact ionization of atoms, " Phys. Rev. A, Gen. Phys., vol. 41, no. 7, pp. 3575-3595, Apr. 1990.
19. + ions, " Phys. Rev. B, Condens. Matter, vol. 62, no. 23, p. 16-116, Dec. 2000.