Surface science, MEMS and NEMS: Progress and opportunities for surface science research performed on, or by, microdevices

Progress in Surface Science

Volumn 88, Issue 2, 2013, Pages 171-211

  Berman, D ^a   Krim, J ^b  

^a ARGONNE NATIONAL LABORATORY   (United States)

^b NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE DISPLACEMENT DETECTION; ELECTRO-MECHANICAL ACTUATIONS; HIGH SURFACE-TO-VOLUME RATIO; MECHANICAL FUNCTIONALITY; MINIATURE MECHANICAL COMPONENTS; NANO ELECTROMECHANICAL SYSTEMS; NANO-DEVICE FABRICATION; SURFACE SCIENCE STUDIES;

ELECTRIC CONNECTORS; GRAPHENE; NEMS;

TWO DIMENSIONAL;

EID: 84877058176     PISSN: 00796816     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.progsurf.2013.03.001     Document Type: Review

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