A nano-to macroscale tribological study of PFTS and TCP lubricants for Si MEMS applications

Tribology Letters

Volumn 38, Issue 1, 2010, Pages 69-78

  Miller, Brendan P ^a   Theodore, Nimel D ^a,b   Brukman, Matthew J ^a,c   Wahl, Kathryn J ^b   Krim, Jacqueline ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

^b NAVAL RESEARCH LABORATORY   (United States)

^c UNIVERSITY OF PENNSYLVANIA   (United States)

Author keywords

AFM Silicon; MEMS devices; Nanotribology; Vapor phase lubricants

Indexed keywords

AFM; MEMS DEVICES; SILICON MEMS; VAPOR PHASE; VAPOR PHASE LUBRICANTS;

ATOMIC FORCE MICROSCOPY; FRICTION; MONOLAYERS; NANOTRIBOLOGY; ORGANIC POLYMERS; OXIDE MINERALS; QUARTZ; QUARTZ CRYSTAL MICROBALANCES; VAPORS;

LUBRICANTS;

EID: 77952673357     PISSN: 10238883     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11249-009-9573-9     Document Type: Article

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