Review of radio frequency microelectromechanical systems technology

IEE Proceedings: Science, Measurement and Technology

Volumn 151, Issue 2, 2004, Pages 93-103

  Lucyszyn, S ^a  

^a Optical Semiconductor Devices Group   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ANTENNAS; CAPACITORS; DIGITAL FILTERS; ELECTRONICS PACKAGING; FIELD EFFECT TRANSISTORS; MICROMACHINING; MONOLITHIC MICROWAVE INTEGRATED CIRCUITS; MULTICHIP MODULES; PHASE SHIFTERS; SEMICONDUCTOR DIODES; SEMICONDUCTOR SWITCHES;

HIGH-Q TUNABLE FILTERS; MICROSYSTEMS PACKAGING; RADIO FREQUENCY MICROELECTROMECHANICAL SYSTEM; SURFACE MICROMACHINING;

MICROELECTROMECHANICAL DEVICES;

EID: 16544382979     PISSN: 13502344     EISSN: None     Source Type: Journal    
DOI: 10.1049/ip-smt:20040405     Document Type: Article

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