Atomic force microscopy using an integrated comb-shape electrostatic actuator for high-speed feedback motion

Applied Physics Letters

Volumn 76, Issue 21, 2000, Pages 3139-3141

  Akiyama, T ^a   Staufer, U ^a   De Rooij, N F ^a  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0010095975     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.126549     Document Type: Article

References (12)

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