Friction in surface-micromachined microengines

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2722, Issue , 1996, Pages 197-204

  Miller, Sam L ^a   Sniegowski, Jeffry J ^a   LaVigne, Glenn ^a   McWhorter, Paul J ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTROMECHANICAL SYSTEMS (MEMS); MICROENGINES;

DESIGN; FABRICATION; FRICTION; MICROMACHINING;

ELECTROMECHANICAL DEVICES;

EID: 0029728232     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)