Development of three-dimensional electrostatic stages for scanning probe microscope

Sensors and Actuators, A: Physical

Volumn 114, Issue 2-3, 2004, Pages 285-291

  Ando, Y ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Comb actuators; Focused ion beam; Inductively coupled plasma; Scanning probe microscope; Silicon on insulator

Indexed keywords

COMB ACTUATORS; FOCUSED ION BEAM; SCANNING PROBE MICROSCOPE; SILICON ON INSULATOR;

ATOMIC FORCE MICROSCOPY; ELECTRIC INSULATORS; ELECTRIC POTENTIAL; ELECTROSTATIC ACTUATORS; FINITE ELEMENT METHOD; GEOMETRY; INDUCTIVELY COUPLED PLASMA; PROBES; SCANNING; SILICON WAFERS; SUSPENSIONS (COMPONENTS); THREE DIMENSIONAL; TOPOLOGY;

MICROSCOPES;

EID: 4344616892     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2003.12.004     Document Type: Article

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