Surface Micromachining: A Brief Introduction

MRS Bulletin

Volumn 26, Issue 4, 2001, Pages 289-290

  Mehregany, Mehran ^a   Zorman, Christian A ^a  

^a NONE

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EID: 0141883074     PISSN: 08837694     EISSN: 19381425     Source Type: Journal    
DOI: 10.1557/mrs2001.61     Document Type: Article

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