Modeling, simulation and measurement of the dynamic performance of an ohmic contact, electrostatically actuated RF MEMS switch

Journal of Micromechanics and Microengineering

Volumn 17, Issue 9, 2007, Pages 1899-1909

  Guo, Z J ^a   McGruer, N E ^a   Adams, G G ^b  

^a NORTHEASTERN UNIVERSITY   (United States)

^b Northeastern University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; COMPUTER NETWORKS; DAMPING; DYNAMIC MECHANICAL ANALYSIS; ELECTRIC CONTACTORS; ELECTRIC SWITCHES; ELECTROSTATIC ACCELERATORS; ELECTROSTATIC ACTUATORS; END EFFECTORS; FINITE DIFFERENCE METHOD; MATERIALS PROPERTIES; MEMS; MICROELECTROMECHANICAL DEVICES; NUMERICAL ANALYSIS; OHMIC CONTACTS; SPRINGS (COMPONENTS); SWITCHES; UNLOADING;

ACTUATION VOLTAGES; NONLINEAR SPRINGING; RF-MEMS SWITCHES;

FINITE ELEMENT METHOD;

EID: 42549152122     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/9/019     Document Type: Conference Paper

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