Tribological degradation of fluorocarbon coated silicon microdevice surfaces in normal and sliding contact

Journal of Applied Physics

Volumn 104, Issue 3, 2008, Pages

  Hook, D Adam ^a   Timpe, Shannon J ^b   Dugger, Michael T ^c   Krim, Jacqueline ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEGRADATION; ELECTRON ENERGY LEVELS; INTERFACIAL ENERGY; NONMETALS; POLYSILICON; PORTABLE EQUIPMENT; SILICON; SULFATE MINERALS; SURFACE TENSION; TRIBOLOGY;

CHEMICAL DEGRADATION; CHEMICAL-; CONTACT INTERFACES; CONTACTING SURFACES; FRICTION PROPERTIES; INTERFACIAL BEHAVIORS; MICRO DEVICES; MICRO SCALES; MICROMACHINED SILICON; POLY-CRYSTALLINE SILICON; REAL CONTACT AREA; REPETITIVE IMPACT LOADING; SILICON MICRODEVICES; SLIDING CONTACTS; SURFACE ENERGIES; TRACK CHANGES; TRIBOLOGICAL DEGRADATION; TRIBOMETER;

SURFACE CHEMISTRY;

EID: 49749083134     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2960567     Document Type: Article

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