Surface roughness, asperity contact and gold RF MEMS switch behavior

Journal of Micromechanics and Microengineering

Volumn 17, Issue 10, 2007, Pages 2006-2015

  Rezvanian, O ^a   Zikry, M A ^a   Brown, C ^b   Krim, J ^b  

^a North Carolina State University   (United States)

^b NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MATHEMATICAL MODELS; MEMS; NUMERICAL METHODS; RELIABILITY THEORY; SURFACE ROUGHNESS;

ASPERITY CONTACT; CONTACT ASPERITY DEFORMATIONS; CONTACT PRESSURES;

SWITCHES;

EID: 34748865043     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/10/012     Document Type: Article

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