AFM study of perfluoroalkylsilane and alkylsilane self-assembled monolayers for anti-stiction in MEMS/NEMS

Ultramicroscopy

Volumn 105, Issue 1-4, 2005, Pages 176-188

  Bhushan, Bharat ^a   Kasai, Toshi ^a   Kulik, Gerit ^b   Barbieri, Laura ^b   Hoffmann, Patrik ^b  

^a OHIO STATE UNIVERSITY   (United States)

^b EPFL   (Switzerland)

Author keywords

Atomic force microscope; Friction; Perfluoroalkylsilane; Self assembled monolayer; Stiction; Wear

Indexed keywords

ADHESION; ATOMIC FORCE MICROSCOPY; COATINGS; FRICTION; LUBRICANTS; MICROELECTROMECHANICAL DEVICES; MOLECULAR STRUCTURE; MONOLAYERS; SELF ASSEMBLY; STICTION; SURFACE ROUGHNESS; TRIBOLOGY; VAPOR DEPOSITION; WEAR OF MATERIALS;

ANTI-STICTION LUBRICANTS; OXIDE LAYERS; PERFLUOROALKYLSILANES; SILICA SUBSTRATES;

SILANES;

ALKYLSILANE; OXIDE; PERFLUOROALKYLSILANE; SILANE DERIVATIVE; SILICON; SILICON DIOXIDE; UNCLASSIFIED DRUG;

ADHESION; ATOMIC FORCE MICROSCOPY; CONFERENCE PAPER; FRICTION; SURFACE PROPERTY; VAPOR;

EID: 27544493520     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultramic.2005.06.034     Document Type: Conference Paper

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