Microscale friction reduction by normal force modulation in MEMS

Journal of Adhesion Science and Technology

Volumn 24, Issue 15-16, 2010, Pages 2669-2680

  Van Spengen, W M ^a,b   Wijts, G H C J ^a   Turq, V ^a,c   Frenken, J W M ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b LEIDEN UNIVERSITY   (Netherlands)

^c UNIVERSITÉ PAUL SABATIER   (France)

Author keywords

friction; MEMS; modulation; vibration

Indexed keywords

FRICTION REDUCTION; MICRO-SCALE FRICTION; MODULATION FREQUENCIES; NORMAL FORCES; SLIDING SURFACE; TRIBOMETERS; VIBRATION;

MODULATION; STICTION;

TRIBOLOGY;

EID: 77958526527     PISSN: 01694243     EISSN: 15685616     Source Type: Journal    
DOI: 10.1163/016942410X508226     Document Type: Article

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